利用微转移印刷技术实现硅光子学的异质集成 - Emiel Dieussaert（根特大学比利时）.pdf

1、CONFIDENTIALMicro-transfer printing for Silicon PhotonicsEmiel Dieussaert PhD,prof.Gunther Roelkens,prof.Bart Kuyken-Photonics Research Group imec Silicon Photonics TechnologyiSiPP200(N)56-128Gbps GeSi Electro-Absorption Modulator56Gbps NRZ128Gb/s PAM-4100Gb/s NRZ56-128Gbps Ge Photodetector50Gbps NR

2、Z128Gbps PAM-4106Gbps PAM-456Gbps NRZ56-106Gbps Silicon Mach-Zehnder Modulator56-160GbpsSilicon Ring Modulator56Gbps NRZ160Gbps PAM-4Y.Tong et al.,PTL 2020High-NA(2dB)&SMF Edge Couplers(3dB)SMF Grating Coupler(2dB)Efficient Thermo-Optic Phase Tuners UCUT Arealight2Silicon WDM filtersSiN Edge Coupler

3、9um MFD(3dB)100Gb/s NRZLow Thermo-Optic Power ConsumptionUCUTUndercutLPCVD SiN WG840nm x 400nmLPCVD SiN EC130nm x 400nm450nm220nmSiSiO2-1.84(0.1)dB/cm-25-30-40-50-60spiral length cm05101520Transmission dB-35-45-5510 mmHigh-density Si Waveguides(0.5-2dB/cm)Integrated LPCVD/PECVD SiN Waveguides Fully

4、Integrated Silicon Photonics Platform for 1310nm/1550nm WavelengthsLow-loss Passive Silicon Waveguide Devices and Fiber Coupling Structures56Gb/s+(Ge)Si Modulators and Ge(Si)Photodetectors2Wafer cross section*Thermo-Optic Phase ShifterFiber Grating CouplerGePhoto-detectorSiliconCarrier-basedPhase Sh

5、ifterFiber Edge CouplerSi SubstrateSiNSiO2CuGePoly-SiWSi p-n diodeair gap(undercut)SiCan be used for applications from the visible to the SWIR(0.5-2.5um)combining Si,SiN and Ge3*Alternative platforms also under development,for which the micro-transfer printing technology can also be leveraged The ne

6、ed for heterogenous integrationMissing building blocks for fully integrated photonic systems-on-chipGain elements and lasers GaN,GaAs,InP,GaSb,Ti:SapphElectro-optic modulators PZT,BTO,2D materials InP,Single photon sources&detectors InAs/GaAs QDs,cQDs,NbTiNElectronics,optical isolators and circulato