Dr. Ronny Kleinhempel-2023-09-06 CIOE talk_RevA - without video.pdf

1、Information Classification:GeneralInformation Classification:GeneralFor Manufacturing of Optical CoatingsFHR Coating Equipment CIOE conference,ShenzhenSeptember 7th,2023Ronny KleinhempelInformation Classification:GeneralAgenda Short company presentation Introduction of FHR.Star platform High precisi

2、on coating equipment FHR.Star.EOSS FHR ALD coater concepts-CONFIDENTIAL-Information Classification:GeneralInformation Classification:GeneralCompany Presentation-CONFIDENTIAL-Information Classification:GeneralFHR product seriesFreely configurable process modules for PVD,PECVD,ALD,RIE,IBE,plasma clean

3、ingFHR.Star product seriesFHR.Boxx product seriesFHR.Line product seriesFHR.Roll product series-CONFIDENTIAL-Information Classification:GeneralCoating materials and sputtering targetsCylindrical and planar sputtering targetsSputtering targets&bonding servicesProduction and development of coating mat

4、erialsDebonding old sputtering targetsBonding new sputtering targetsConsultation on the optimal design,development and production of heat sinks and back platesRecycling valuable materials or disposing of residual materialsLarge volume or individual pieces-CONFIDENTIAL-Information Classification:Gene

5、ralFHR.Star seriesCoating Equipment for optical applications:Catalogue optics:Medical/biosciences(Fluorescence microscopy)Filters(notch,edge,)Beam-splitterLaser optics(medical,manufacturing etc)NIR bandpass filters for 3D sensing:Face recognition for user-machine interactions LIDAR as key technology

6、 for autonomous drivingDWDM/CWDM filtersTelecommunication Semiconductor wafer-level processing-CONFIDENTIAL-Information Classification:GeneralFHR.Star seriesModular Clustertype Coating EquipmentConcept Overview-CONFIDENTIAL-Information Classification:GeneralFHR.Star seriesSingle process chambersConc