TOPCon电池结构中，各类膜主流制备方法-行业数据

TOPCon电池结构中，各类膜主流制备方法

对于 TOPCon背面，SiO2膜层，LPCVD、PECVD、ALD均可实现。而掺杂多晶硅层的制备方法，PECVD可以容易实现原位掺杂，绕镀、爆膜等问题有有效解决途径，并且维护成本低。而 LPCVD法虽然工业应用成熟，但清洗绕镀可能导致电池损伤、非原位掺杂工艺流程不符合“精益”生产要求，石英管炸裂等导致维护成本较高。

行业数据

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所属报告：