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图12.深紫外（DUV）光刻术
图12.深紫外（DUV）光刻术
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电子行业专题：芯片制造核心瓶颈环节光刻机国产替代加速推进-231201（53页）.pdf
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蔡司最畅销的几款DUV（深紫外线）、NUV（近紫外线）物镜系统
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行业数据
2025-06-12
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采用浸没式DUV与EUV的工艺步数对比
fCDlt6XoibrmraXpqqQgfCBDTVAgfCDlubLomoAgfCDmtYvph48gfCDlhYnliLsgfCDot5/ouKogfCDmsonnp68gfCDmuIXmtJcgfCDnoazmjqnmqKEgfAp8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8Cnwg5rW45rKh5aSa6YeN5Zu+5qGIIHwgMjcgfCAzNCB8IDYwIHwgIHwgIHwgIHwgIHwgIHwKfCBFVVYgfCAgfCAgfCAgfCAgfCAgfCAgfCAgfCAxMCB8CgrotYTmlpnmnaXmupDvvJpBU01M77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
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行业数据
2024-12-09
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光刻机的结构构成（以浸没式DUV设备TWINSCANNET：2100i为例）
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行业数据
2024-12-09
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UV和DUV光刻机数值孔径◆
fCBZZWFyIHwgTkEgVmFsdWUgfAp8LS0tLS0tfC0tLS0tLS0tLS18CnwgMTk4MCB8IDAuMyAgICAgIHwKfCAxOTgyIHwgMC40ICAgICAgfAp8IDE5ODYgfCAwLjUgICAgICB8CnwgMTk5MCB8IDAuNyAgICAgIHwKfCAxOTk0IHwgMS4wICAgICAgfAp8IDIwMDAgfCAxLjIgICAgICB8CnwgMjAwNCB8IDEuMyAgICAgIHwKfCAyMDEwIHwgMS4zNSAgICAgfAoKKirotYTmlpnmnaXmupAqKjogQVNNTCwg5b+X5pm66K6vLCDljYrlr7zkvZPooYzkuJrop4Llr58sIOS4nOWQtOivgeWIuOeglOeptuaJgA==
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行业数据
2024-10-16
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DUV光刻机投影物镜示意图（折射式）◆
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行业数据
2024-10-16
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DUV光刻主要用于28nm及以上成熟制程
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行业数据
2024-10-11
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ASML各型号DUV收入（百万欧元）
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行业数据
2024-10-11
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图23DUV光源产生原理以及光谱分布
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行业数据
2024-09-14
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公司EUV与DUV光刻机产能规划
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行业数据
2023-06-16
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DUV1980主要用于成熟制程，多重曝光可以实现14-10nm制程生产
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行业数据
2023-04-14
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DUV光刻胶中国大陆需求（吨）
fCDlubTku70gfCBLckYgfCBBckYgfAp8LS0tLS0tfC0tLS0tLXwtLS0tLS18CnwgMjAxOCB8IDUwMCAgfCA1MDAgIHwKfCAyMDE5IHwgNzAwICB8IDkwMCAgfAp8IDIwMjAgfCA4MDAgIHwgMTIwMCB8CnwgMjAyMUV8IDEwMDAgfCAxNTAwIHwKCui1hOaWmeadpea6kO+8mlRyZW5kQmFua+OAgeW+t+mCpueglOeptuaJgA==
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行业数据
2022-05-20
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DUV光刻胶原材料体系变化
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行业数据
2022-05-20
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电子行业专题：芯片制造核心瓶颈环节光刻机国产替代加速推进-231201（53页）.pdf
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