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OPC处理前后的图形及其曝光结果
OPC处理前后的图形及其曝光结果
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fCDlm77ooaggfCBPUEPlpITnkIbliY3lkI7nmoTlm77lvaLlj4rlhbbmm53lhYnnu5PmnpwgfAp8IDotLTogfCA6LS0gfAp8IChhKSBPUEPlpITnkIbliY3nmoTlm77lvaLlj4rlhbbnm7TmjqXmm53lhYnnu5PmnpwgfCAgfAp8IChiKSBPUEPlpITnkIblkI7nmoTlm77lvaLlj4rlhbbmm53lhYnnu5PmnpwgfCAgfAoK6LWE5paZ5p2l5rqQ77ya6Iqv5Yi26YCg77yM5Zu955ub6K+B5Yi456CU56m25omA
所属报告：
电子行业：光刻自主可控核心环节国产替代迫在眉睫-250422（47页）.pdf
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表3-2：OPC政策差异化评估表
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政策法规
2026-03-17
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表4-5：OPC政策长效化机制建设表
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2026-03-17
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表1-1：中国OPC发展规模可验证数据表
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市场规模
2026-03-17
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重点城市OPC政策对比
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政策法规
2026-03-17
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三城OPC政策发布时间轴
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政策法规
2026-01-26
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三城OPC人才政策支持对比（单位：万元）
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政策法规
2026-01-26
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三城OPC政策创新点数量对比
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政策法规
2026-01-26
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三城OPC政策综合评估雷达图
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政策法规
2026-01-26
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由于光的衍射造成的图像失真及OPC效果对比
fCDpobnnm64gICAgICAgfCBPUEPliY0gfCBPUEPlkI4gfAp8LS0tLS0tLS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tfAp8IOaOqeaooeeJiCAgICAgfCAgICAgICAgfCAgICAgICAgfAp8IOaKleW9seeJqemVnCAgIHwgICAgICAgIHwgICAgICAgIHwKfCDnoYXniYcgICAgICAgfCAgICAgICAgfCAgICAgICAgfAp8IOmihOacn+eUtei3r+WbvuW9oiB8ICAgICAgICB8ICAgICAgICB8Cnwg5pud5YWJ55S16Lev5Zu+5b2iIHwgICAgICAgIHwgICAgICAgIHwKCui1hOaWmeadpea6kO+8mum+meWbvuWFiee9qeaLm+iCoeivtOaYjuS5pu+8iOazqOWGjOeov++8iQ==
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行业数据
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最新数据
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➢ 偏振照明：通过起偏器可以将自然光转换为偏振光，起偏器只允许特定方向振动的光通过，而吸收或阻挡其他方向振动的光。检偏器则用于检测光的偏振状态，通过偏振照明，以减少反射眩光，提高对比度。
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电子行业：光刻自主可控核心环节国产替代迫在眉睫-250422（47页）.pdf
OPC处理前后的图形及其曝光结果
物镜的焦距越短则孔径角越宽，从而获得更高的NA和分辨率
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